| 摘要 |
<p>PURPOSE:To push up only defective wafers out of many wafers, and facilitate the handling of them by installing an air cylinder to select an arbitrary pushing-up plate out of many pushing-up plates, and a base stand to ascend the pushing-up plate. CONSTITUTION:In a frame (a), many pushing-up plates (b) are arranged at wafer arrangement intervals so as to be able to freely move up-and-down. A piston rod, of an air cylinder (c), which is arranged so as to match with each pushing plate (b) engages with the pushing-up plate (b). When a cylinder base stand (d) is made to ascend by a screw bolt (e) in the above state, an arbitrary pushing-up plate (b) ascends; then a wafer holder (f) arranged on the plate ascends; an arbitrary wafer (g) accommodated in the holder is pushed out upward from a wafer row. Thereby, a desired wafer can be selectively and automatically pushed out from the arranged wafer row upward.</p> |
