| 摘要 |
<p>PURPOSE:To improve processing capability of wafer transferring by selectively and properly using several kinds of hands by means of an automatic hand exchanger. CONSTITUTION:A wafer transferring apparatus 7 transfers a wafer 8 from a quartz jig 9 as a second accommodation jig to a cassette 10 as a first accommodation jig, or transfers from the cassette 10 to the quartz jig 9. That is, the wafer transferring apparatus 7 is constituted of a clean robot 15 and an automatic hand exchanging station 16. The robot is provided with a wafer transferring hand 13, an automatic hand exchanger 14, etc., at the tip of a hand. The hand exchanging station stores a plurality of different kinds of wafer transferring hands. The automatic hand exchanger 14 is used for a process wafer transferring hand, a dummy wafer transferring hand, etc., in accordance with an application object. Thereby, the process working efficiency of transferring wafer and the like can be improved.</p> |
