| 摘要 |
PURPOSE:To prevent the distortion of an anode and a cathode, and to hold parallelism between the anode and the cathode with high accuracy by supporting the anode and the cathode by a second tube movably arranged into a first tube. CONSTITUTION:Short tubes 20a, 20b as second tubes, which are composed of the ceramics of the same material as a discharge tube 1 and the directions of which are conformed approximately, are disposed movably along the axial direction in the cylindrical discharge tube 1 consisting of ceramics as a first tube. When an anode 7 and a cathode 8 are shifted in the axial direction of the discharge tube 1 together with the short tubes 20a, 20b by thermal expansion at the time of laser oscillation, the deformed sections 9c, 9d of current introducing plates 9a, 9b connected to the anode 7 and the cathode 8 through conductor bars 23a, 23b are deformed in the axial direction. Accordingly, distortion due to thermal expansion generated between the conductor bars 23a, 23b and among the conductor bars 23a, 23b and current introducing terminals 12a, 12b is prevented, thus holding parallelism between the anode 7 and the cathode 8 with higher accuracy. |
