| 摘要 |
PURPOSE: To enhance capillary characteristics, a fluid flow velocity, wettability, a damping factor and a frequency response by forming a mask having a saw- edged outside surface on a surface of a substrate and electroforming a nozzle plate having an inside surface outline delimited by a sculpture surface area of the mask of the substrate surface and an orifice opening. CONSTITUTION: A stainless steel substrate 10 having a photoresist surface layer 12 thereon is moved to a photoresist masking and etching station, where a sculpture surface pattern 14 is etched to a photoresist mask segment 16. At an electroforming station, an orifice having a plurality of inside grooves 20 duplicated from the groove 14 of the mask segment 16 is provided. The grooves 20 delimit a saw-edged pattern to an inside surface of the convergent orifice of a nozzle plate 18. Finally the nozzle plate 18 is separated from the substrate 10, whereby a structure of the nozzle plate is left. A frequency response, capillary recovery efficiency, a fluid fill speed, dynamic responsivity and wettability are increased. |
