External resonance circuit type radio frequency quadrupole acceleration.

摘要

An external resonance circuit type RFQ accelerator including quadrupole electrodes (2a min , 2b;, 2c min , 2d min ) whose opposing faces are undulated and a separate radio frequency resonance circuit for generating a radio frequency high voltage to be supplied to the electrodes in which parts exposed to the ion beam, e.g. the electrodes and at least part of metallic supports for supporting the electrodes and power supplying lines are provided with a surface coating of silicon, doped silicon, or other element of mass no. 28 or below. The object is to prevent the implanted sample substrate (5) from being contaminated by heavy metal particles sputtered by the ion beam.