METHOD FOR MAKING SUBMICRON MASK OPENINGS USING SIDEWALLS AND LIFT-OFF TECHNIQUES,申请号EP19860113666-传众专利搜索

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发明名称	METHOD FOR MAKING SUBMICRON MASK OPENINGS USING SIDEWALLS AND LIFT-OFF TECHNIQUES
摘要
申请公布号	EP0223032(A3)	申请公布日期	1990.06.27
申请号	EP19860113666	申请日期	1986.10.03
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	COOK, ROBERT KIMBALL;SHEPARD, JOSEPH FRANCIS
分类号	H01L21/302;H01L21/033;H01L21/3065;(IPC1-7):H01L21/00;H01L21/308	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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