发明名称 Method of producing apertures in an integrated circuit.
摘要 <p>Formation of contact apertures through a layer of insulating material. According to the invention, an etching attack is undertaken in a first layer (12) of insulating material, through a mask, to define apertures (19a, 19b) which are preferably incompletely etched, the mask is removed, a second layer (21) is deposited and a second etching attack is undertaken, without mask, until contact zones on the elements (14, 15) are cleared. &lt;IMAGE&gt;</p>
申请公布号 EP0375501(A1) 申请公布日期 1990.06.27
申请号 EP19890403409 申请日期 1989.12.08
申请人 THOMSON COMPOSANTS MILITAIRES ET SPATIAUX 发明人 BLANCHARD, PIERRE;BAUSSAND, PATRICK
分类号 H01L21/311;H01L21/768 主分类号 H01L21/311
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