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发明名称
VERFAHREN ZUR SELEKTIVEN ABSCHEIDUNG ODER IMPLANTATION VON NEUTRALEN TEILCHEN ODER IONEN
摘要
申请公布号
DD280198(A1)
申请公布日期
1990.06.27
申请号
DD19890326066
申请日期
1989.02.28
申请人
AKADEMIE DER WISSENSCHAFTEN DER DDR,DD
发明人
ALBRECHT,GUENTER,DD;MUESSIG,HANS-JOACHIM,DD;ROHRBECK,WOLFGANG,DD
分类号
H01J3/04;(IPC1-7):H01J3/04
主分类号
H01J3/04
代理机构
代理人
主权项
地址
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