MECHANICAL QUANTITY SENSOR ELEMENT AND METHOD FOR MAKING THE SAME

摘要

A mechanical quantity sensor element making use of a stress-magneto effect of noncrystalline magnetic alloy. This mechanical quantity sensor element is manufactured by coupling a piece of noncrystalline magnetic alloy having positive magnetostriction with another material such as, for example, thermo-setting resin at a temperature exceeding an operating temperature range of the mechanical quantity sensor element, and then cooling them to the operating temperature range. Due to a difference in a coefficient of thermal expansion between the piece and the material, compression strain is preliminarily given to the noncrystalline magnetic alloy piece, and the mechanical quantity sensor element has an excellent linearity and a wide detectable range for mechanical quantities.