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发明名称
MAGNETRON SPUTTERING DEVICE
摘要
申请公布号
JPH02166278(A)
申请公布日期
1990.06.26
申请号
JP19880320376
申请日期
1988.12.21
申请人
AMORUFUASU DENSHI DEVICE KENKYUSHO:KK
发明人
SHIRAKAWA KIWAMU;HIRATA MAMORU
分类号
C23C14/35;H01L21/203
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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