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发明名称
INSPECTOR FOR CLEARANCE HOLE FOR INTERMEDIATE LAYER SUBSTRATE
摘要
申请公布号
JPH02165071(A)
申请公布日期
1990.06.26
申请号
JP19880321293
申请日期
1988.12.19
申请人
FUJITSU LTD
发明人
GOTO TORU
分类号
G01R31/02;H05K3/40
主分类号
G01R31/02
代理机构
代理人
主权项
地址
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