METHOD OF PROCESSING HETEROEPITAXIAL FILMS OF GERMANIUM AND SILICON,申请号SU19843833591-传众专利搜索

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发明名称	METHOD OF PROCESSING HETEROEPITAXIAL FILMS OF GERMANIUM AND SILICON
摘要
申请公布号	SU1245161(A1)	申请公布日期	1990.06.23
申请号	SU19843833591	申请日期	1984.12.29
申请人	NOVOSIBIRSKIJ G UNIV IM.LENINSKOGO KOMSOMOLA;INST POLUPROVODNIKOV	发明人	ASEEV A.L.,SU;PINTUS S.M.,SU;PCHELYAKOV O.P.,SU;STENIN S.I.,SU;TOROPOV A.I.,SU
分类号	H01L21/263	主分类号	H01L21/263
代理机构		代理人
主权项
地址

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