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发明名称
ION IMPLANTING EQUIPMENT
摘要
申请公布号
JPH02162641(A)
申请公布日期
1990.06.22
申请号
JP19880318187
申请日期
1988.12.15
申请人
NISSIN ELECTRIC CO LTD
发明人
KAWAKAMI TOSHIO;NAGAI NOBUO
分类号
H01J37/147;H01J37/317;H01L21/265
主分类号
H01J37/147
代理机构
代理人
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地址
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