| 摘要 |
<p>PURPOSE:To enable the improvement in cooling property by deforming a metallic thin film and a cushion member according to the deformation of the substrate by a method wherein a substrate is kept by a substrate holder via cushion member with the formation of a metallic thin film of good thermal conductivity. CONSTITUTION:The substrate 5 to be treated in a vacuum chamber is kept by a substrate holder 1 cooled by coolant-water circulation and the like via cushion member 4. The cushion member 4 is formed out of a mixture of the powder or fiber 9 of metal, carbon, etc. with elastomer 8, and a metallic thin film 6 is formed on the surface of the member 4 in contact with the substrate 5. The thin film 6 is made of a metallic film of good thermal conductivity such as an Al monolayer film, a double layer film produced by covering a Cr or Ti film with a Cu or Ag film, or a three-layer film produced by coating this double-layer film with a film of Ni or the like, and is formed to a thickness of 1-100mum.</p> |
