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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH02163369(A)
申请公布日期
1990.06.22
申请号
JP19880317895
申请日期
1988.12.16
申请人
FUJI ELECTRIC CO LTD
发明人
ARISAWA TAKESHI
分类号
C23C14/34;H01L21/203;H01L21/285
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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