| 摘要 |
PURPOSE:To prevent the generation of a deviation and to prevent the spacing of a vacuum flange mounting part in the peripheral edge of a thin film for transmission of radiation light by providing sealing between the high vacuum area on a radiation light source side and a chamber atmosphere on a transfer device side and forming the above-mentioned mounting part into an immobile peripheral structure. CONSTITUTION:The vacuum sealing on a beam line 102a side and the transfer device chamber 104a side is executed by pinching a thin beryllium film 20 by means of an O-ring 30. Clips 90 are bolted to a vacuum flange 10 and the peripheral edge of the thin film 20 is crimped by an extremely strong force between a stopper flange 40 and an antislip ring 50 and, therefore, even if there is a pressure difference of about the atm. pressure between the beam line 102a side of a high vacuum state and the chamber 104a side, the peripheral edge of the thin film 20 is prevented from deviating toward the radial direction thereof. The sectional shape of the ring 50 is sharpened and since the contact area of the flange 10 and the thin film 20 is small, not only the deviation preventing effect is obtd. but also the vacuum sealing effect is further obtd. |
