| 摘要 |
<p>PURPOSE:To exactly detect even a minute flow by inserting in advance a piston into a body for constituting an electric galvanometer, at the time of detecting a flow of a fluid in an arbitrary part in a duct line for controlling the fluid, and detecting a variation of a magnetic field generated between a magnetic material being a part of the piston and a fixed magnetic material by a sensor. CONSTITUTION:The electric galvanometer is constituted of a body 1, a fixed magnetic material 2, a filter 3, a piston 4, a spring 5 for pressing it, a sensor 6, and a stop bush 7 attached to both ends of the body 1. On the fluid receiving port side of the electric galvanometer, the fixed magnetic material 2 and the filter 3 for eliminating a foreign matter in a fluid are provided, and the piston 4 provided with a magnetic material 4a can be brought to reciprocating slide, while closing a passage in a fluid passage. Also, on both ends of the piston 4, a notch is provided, and a notch 4C in these notches is brought into contact with the bush 7 so that an outflow of the fluid is not obstructed. The electric galvanomter is constituted in such a way and a small-sized IC sensor 6 consisting of a Hall element and an amplifying circuit is provided on the body 1, and a variation of a magnetic field in the magnetic materials 2, 4a is detected thereby.</p> |
