| 摘要 |
PURPOSE:To make it possible to measure nitrogen oxide in a combustible gas at room temperature quickly by forming heat diffusing titanium thin films in a Y-branched pattern on a Y-cut LiNbO3 substrate for a detecting element. CONSTITUTION:A lightguide is formed as follows. Patterning is performed on a Y-cut LiNbO3 substrate 1 by photolithography method, and a titanium thin film is evaporated to a thickness of about 500-1,500Angstrom . Thereafter, only the necessary part is made to remain. The device is heated in an oxygen atmosphere at about 900-1,100 deg.C for about 4-10 hours. Thus Y-branched heat diffused thin films 2, 2' and 2'' are formed. A phthalocianine metal complex thin film 3 covers the heat diffused titanium thin film 2'. In this way, the heat diffused titanium thin films are formed, and the phthalocianine complex metal thin film covers the one branched side in this Y-branched lightguide. Each end part of the Y-branched lightguide is connected to the optical fiber 4. A single-mode optical fiber is used for the input-side optical fiber 4. Multimode optical fibers are used for output-side optical fibers 4' and 4''. |
