| 摘要 |
PURPOSE: To obtain a lens having mechanical strength and chemical resistance by depositing a reinforcing material on a lens and then making the reinforcing material intrude into the lens by an ion bombardment method. CONSTITUTION: A reaction chamber 10 is evacuated and a coating layer 19 of a reinforcing material having 500-5000Å thickness is formed in the presence of Ar. Then the layer is subjected to ion bombard by an Ar ion gun 12 with 100 to 150KeV voltage applied to form an embedded layer 20. As for the reinforcing material, silica and alumina can be used. The lens 3 thus treated is then coated with a second layer 21 of a reinforcing material having 0.5 to 5μm thickness by spraying the reinforcing material after the inner pressure of the chamber is controlled to 10<-4> to 10<-5> mb and the Ar partial pressure to 1 to 3×10<-2> mb and the oxygen partial pressure to 4 to 6×10<-3> mb. Thereby, by depositing and implanting the reinforcing material 20, 21 into the lens 3, the mechanical strength and chemical resistance of the lens can be obtd. without chemical treatment. |
