| 摘要 |
<p>PURPOSE:To continuously rotate a suction stage in one direction, and effectively transfer semiconductor elements by performing vacuum suction of a transferring equipment for semiconductor element, for each suction hole, at each suction timing. CONSTITUTION:A semiconductor transferring equipment mounts a semiconductor element at a position A, and transfers it at a position C by a die collet or the like. In this case, a vacuum holder 13 is previously positioned and fixed on a base stand such that one end-portion of a long hole 15 is arranged at the point A. This vacuum suction equipment is started, and a negative pressure chamber 14 is kept at a negative pressure; in this state, a holder 11 is rotated; a semiconductor element is mounted on a first suction part 1b arranged at the point A. The lower opening part of a suction hole 12 of the holder 11 corresponds with the long hole 15 of the vacuum holder 13, and suction is started by the first suction part 1b. After that, the holder 11 is rotated by 90 deg. in the arrow direction, and the first suction part 1b is rotated at a point B; then a second suction part 1b adjacent to the first one is rotated at the point A, and, here, a second semiconductor element is mounted.</p> |
