| 摘要 |
<p>PURPOSE:To contrive the improvement of response speed by providing a semiconductor film whose resistance temperature coefficient is negative as a heating resistor on the outside periphery of a sensor pipe. CONSTITUTION:When cold gas flows into a heated sensor part, the temperature of the sensor part is lowered. In a constant-current control system, when the resistance temperature coefficient alpha of a resistor provided on the outside periphery of a sensor pipe is position, a resistance becomes small due to a fact that a temperature is lowered. Accordingly, a heating value also becomes small and it works so as to lower a temperature. Therefore, it takes a long time for reaching a stationary state. On the other hand, when alpha is negative, the resistance becomes large due to a fact that a temperature is lowered, and the heating value is increased. Accordingly, it works so as to obstruct the fall of a temperature, and the time for reaching a stationary state is short. Therefore, by forming a semiconductor film whose resistance temperature coefficient alphais negative on the outside periphery of the sensor pipe as heating resistor, the response speed of the sensor can be improved.</p> |
