发明名称 HOJIGATAKANKOSEISOSEIBUTSU
摘要 PURPOSE:To increase the sensitivity of a compound contg. a quinonediazido group, by using a specified heterocyclic compound contg. nitrogen as a sensitizer. CONSTITUTION:The sensitivity of a photosensitive composition is remarkably increased by combinedly using a compound contg. a quinonediazido group as a photosensitive substance and at least 1 kind of sensitizer for the compound selected from pyrrolidone, oxyindole, imidazolidone, benzimidazolinone, imidazolidinethione, oxazolidone, benzoxazolinone, isoindolinone, thioindole, pyrazolone, isatin, succinic acid imide, thiazolidinedione, rhodanine, oxazolidinedione, glutaric acid imide, piperidone and derivs. thereof.
申请公布号 JPH0228139(B2) 申请公布日期 1990.06.21
申请号 JP19820032926 申请日期 1982.03.02
申请人 TOKYO OHKA KOGYO CO LTD 发明人 YAMAMOTO CHO;NAKANE HISASHI;YOKOTA AKIRA;KOMINE TAKASHI;HASHIMOTO KOICHIRO;TODA SHOZO
分类号 G03C1/72;G03F7/022;H01L21/027 主分类号 G03C1/72
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