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发明名称
BESCHICKUNGS- BZW. ENTLEERUNGSKAMMER-VORRICHTUNG
摘要
申请公布号
DE3941502(A1)
申请公布日期
1990.06.21
申请号
DE19893941502
申请日期
1989.12.15
申请人
NIHON SHINKU GIJUTSU K.K., CHIGASAKI, KANAGAWA, JP
发明人
SUWA, HIDENORI;ONO, SHINICHI;HIRANO, HIROYUKI;NARUSE, HUMIO, CHIGASAKI, KANAGAWA, JP
分类号
C23C14/56;H01L21/00
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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