| 摘要 |
PURPOSE:To automatically detect a flaw, etc., on the surface of an object to be inspected by providing a lighting equipment in which a diffusion cylinder and an outer cylinder have a diameter ratio of a prescribed range and which is provided with an incadescent lamp placed circularly at an equal interval in the peripheral direction between both of them. CONSTITUTION:While a plunger 21 is stopping in a position of the upper end, a light beam irradiates the surface of an object to be inspected 3 by a lighting equipment 24. In this case, when the inside diameter of a diffusion cylinder 13 and the outside diameter of the object to be inspected are denoted as D and (d), respectively, they are allowed to have a relation of 1<D/d>3.5. Therefore, light beams emitted from incadescent lamps 17, 18 go into the diffusion cylinder, the inside peripheral surface of the diffusion cylinder 13 is converted into a surface light source, and the illuminance is equalized. In this case, a part of the light beam is reflected by a reflecting surface 14a of an outer cylinder 14 and goes into the diffusion cylinder 13, and the illuminance is increased thereby. Also, since the lamps 17, 18 are placed in two upper and lower stages, uniformity of the illuminance further increases. On the other hand, a spherical surface 3b and a flat surface 3c are brought to image pickup by an image sensor 19, image data is brought to image storage 25, and brought to image data processing 20 and the surface is inspected automatically. |
