| 摘要 |
PURPOSE:To improve the locating rigidity and stopping accuracy of a stage by adsorbing to a fixed member an adsorbing device mounted on the stage through a elastic body in the direction of feeding the stage when the stage is stopped for location. CONSTITUTION:A stage is constituted from a floating member 3 and a stage body thereon. After the stage is located and stopped, an adsorbing pad 21 is adsorbed to the bottom surface of a guide groove of a guide member 1 by vacuum force. Thus, the stage is coupled with the guide member 1 through an elastic body 17 as it is guided by static pressure fluid. At this time, since a leaf spring 20 has low rigidity in the direction of plate thickness, it has no effect on the accuracy in static pressure fluid guide and can locate and stop the stage only in the feeding direction. When the stage is driven by a drive as a adsorbing device is in adsorbing operation, the elastic body 17 is transformed in proportion to the drive force so that fine feed of the stage can be carried out. |
