| 发明名称 |
Monocrystal ingot pulling apparatus. |
| 摘要 |
<p>A monocrystal ingot pulling apparatus adapted for the Czochralski method, wherein a purge duct means consisting of a purge tube (11) and a purge tube holder (10) is adapted such that the height of the lower end thereof is adjustable and a loop wheel drive mechanism (20) is provided for changing the height of the lower end of the purge duct means.</p> |
| 申请公布号 |
EP0373899(A2) |
申请公布日期 |
1990.06.20 |
| 申请号 |
EP19890312996 |
申请日期 |
1989.12.12 |
| 申请人 |
SHIN-ETSU HANDOTAI COMPANY, LIMITED |
发明人 |
IWASAKI, ATSUSHI |
| 分类号 |
C30B27/00;C30B15/00;C30B29/06;H01L21/208 |
主分类号 |
C30B27/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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