KOHOWAJIKAJISEIZAIRYOOYOBISONOSEIZOHOHO

摘要

PURPOSE:To prepare the titled high-performance magnetic material, rapidly, by the reactive sputtering in an atmosphere of N2 and Ar gas using pure iron as a target under specific condition. CONSTITUTION:Pure iron used as a target for the reactive sputtering is cooled with water to attain a substrate temperature of <=300 deg.C. A magnetic material containing >=10wt% of Fe16N2 and having a thickness of >=1mum can be obtained by the reactive sputtering in an atmosphere of N2 and Ar having an N2-partial pressure of 1X10<-2>Torr. A magnetic material having excellent saturation magnetic properties can be prepared from pure iron by this process.