ION IMPLANTATION CONTROL DEVICE,申请号JP19880313496-传众专利搜索

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发明名称	ION IMPLANTATION CONTROL DEVICE
摘要
申请公布号	JPH02160354(A)	申请公布日期	1990.06.20
申请号	JP19880313496	申请日期	1988.12.12
申请人	FUJI ELECTRIC CO LTD	发明人	KOYAMA YOICHI
分类号	H01J37/04;H01J37/317;H01L21/265	主分类号	H01J37/04
代理机构		代理人
主权项
地址

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