MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19880314135-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH02159015(A)	申请公布日期	1990.06.19
申请号	JP19880314135	申请日期	1988.12.12
申请人	NEC KYUSHU LTD	发明人	MIYAJIMA TAKASHI
分类号	G03F7/16;B05C5/00;B05C11/08;B05C11/10;H01L21/027	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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