发明名称 |
GENERATION OF RELIEF PATTERN AND USE |
摘要 |
PURPOSE: To improve durability against plasma including oxygen by exposing a part of a polymer material layer to active rays and bringing a specified polyfunctional org. metal material into contact with the layer to make the thickness of the layer in the exposed part different from the thickness of the layer in an unexposed part. CONSTITUTION: A photosensitive polymer material layer containing functional groups with reactive hydrogen and/or precursors of reactive hydrogen functional groups is partly exposed to active rays to change amt. of hydrogen functional groups in the exposed part. The layer is then brought into contact with a polyfunctional org. metal material. The polyfunctional org. metal material has at least two functional groups which reacts with the reactive hydrogen groups of the polymer material and make the thickness of the layer in the exposed part different from the thickness in an unexposed part. Thereby, the obtd. pattern is stable at high temp. and has good durability against an org. solvent. |
申请公布号 |
JPH02158737(A) |
申请公布日期 |
1990.06.19 |
申请号 |
JP19890255132 |
申请日期 |
1989.09.29 |
申请人 |
INTERNATL BUSINESS MACH CORP <IBM> |
发明人 |
DONISU JIYOOJI FURAJIERO;MAIKURU HATSUAKISU;SUUZAN KANINGAMU NOE;JIEIN MAAGARETSUTO SHIYOO;DEIBITSUTO FURANKU UITSUTOMAN |
分类号 |
G03F7/075;G03F7/26;H01L21/027 |
主分类号 |
G03F7/075 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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