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发明名称
FILM FORMING DEVICE BY PLASMA CVD METHOD
摘要
申请公布号
JPH02159378(A)
申请公布日期
1990.06.19
申请号
JP19880312106
申请日期
1988.12.12
申请人
CANON INC
发明人
OKAMURA NOBUYUKI;ANDO KENJI
分类号
C23C16/50;C23C16/511
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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