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经营范围
发明名称
ION BEAM SPUTTERING METHOD
摘要
申请公布号
JPH02159374(A)
申请公布日期
1990.06.19
申请号
JP19880312996
申请日期
1988.12.13
申请人
UBE IND LTD
发明人
YAMAMOTO KIMISUMI;KAMATANI YOSHITO;OKITA TETSUO
分类号
C23C14/46
主分类号
C23C14/46
代理机构
代理人
主权项
地址
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