发明名称 |
Self aligning air bearing platform |
摘要 |
Two partial cylindrical, externally pressurized static air bearings are used to provide a self aligning air bearing platform. The self aligning air bearing platform is useful in a tape automated bonding system to bond a semiconductor device having a high pin count. A bottom bearing block has a top surface in the shape of an arc and at least one air outlet. A middle bearing block has a bottom surface configured to mate with the top surface of the bottom bearing block. The middle bearing block also has a top surface in a shape of an arc which is rotated 90 DEG with respect to the arc shaped top surface of the bottom bearing block and at least one air outlet. A top bearing block mates with the middle bearing block and provides the platform for holding the semiconductor device. Air bearings between the moving bearing blocks provide a low friction bearing for the aligning platform.
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申请公布号 |
US4934671(A) |
申请公布日期 |
1990.06.19 |
申请号 |
US19890343768 |
申请日期 |
1989.04.27 |
申请人 |
MOTOROLA INC. |
发明人 |
LANINGA, ALBERT J.;LEHNEN, DAVID C. |
分类号 |
B23Q1/38;B23Q1/54 |
主分类号 |
B23Q1/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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