发明名称 Deposition of gradient index coatings using coevaporation with rate control
摘要 A method of depositing an optical coating with a predetermined refractive index n and a thickness d, using a first source material having a refractive index nH greater than n and a known rate of deposition rH and a second source material having a refractive index nL less than n and a variable rate of deposition rL, requires calculating the deposition rate rL according to the equation <IMAGE> and depositing the first source material at the rate rH and the second source material at the rate rL for a time interval T=d/(rH+rL). A method of depositing a gradient index optical coating with a predetermined refractive index profile n(d) which is a function of depth d in the coating uses a first source material having a refractive index nH and a known rate of deposition rH and a second source material having a refractive index nL and a variable rate of deposition rL. The method includes the steps of setting the initial depth d to 0, then calculating the deposition rate rL(d) for the depth d according to the equation. <IMAGE> The first source material is then deposited at the rate rH and the second source material at the rate rL(d) for a time interval DELTA t. At the end of the time interval, the depth d is updated by adding an amount DELTA d=(rH+rL(d)) DELTA t. The steps of calculating, depositing, and updating are repeated until the predetermined refractive index profile is achieved.
申请公布号 US4934788(A) 申请公布日期 1990.06.19
申请号 US19870028356 申请日期 1987.03.20
申请人 ROCKWELL INTERNATIONAL CORPORATION 发明人 SOUTHWELL, WILLIAM H.
分类号 C03C17/00;G02B1/11;G02B5/28 主分类号 C03C17/00
代理机构 代理人
主权项
地址