DEVICE FOR MEASURING STRESSES IN VACUUM DEPOSITION COATINGS

摘要

of the Invention In measuring stresses present in material coatings deposited by sputtering, a pressure transducer is used as an in-situ sensor. The transducer has a flexible conductive surface clamped about its periphery to a rigid substrate and forms a variable capacitor with a relatively rigid conductor across an underlying evacuated chamber. A mask element having an aperture that covers an area confined within the boundary defined by the underlying evacuated space is located adjacent the flexible conductive surface to limit the exposed surface area to receive sputtered material coating. Electronic circuitry monitors changes in the capacitance of the sensor and reflects the stress types and values attributed to each coating.