| 摘要 |
PURPOSE:To provide a flame sensor in which a gas sensor and a high temperature resistance sensor are formed on a substrate material, an output of the gas sensor can be corrected by a output of the temperature sensor measured under the same condition. CONSTITUTION:Two pairs of platinum electrode films 4, 4' 4'' and 4''' are formed on the sruface of the alumina ceramic material 1. Between the surface 4'' and 4''' of the substrate material 1 is formed an oxide thermistor film 7 having a high temperature thermistor characteristic. Then, between the platinum electrode films 4 and 4' at the other surface of the substrate material 1 is fitted oxide film 5 of perovskite and a protective film is overlapped on the film 5. Thereby , a flame temperature and a combustion condition can be detected simultaneously and it can be detected that a complete combustion is found only in a zone having a high electrical resistance at the gas sensitive part. |
