| 摘要 |
PURPOSE:To obtain an anticorrosion material by which a tube molecular pump can be sufficiently safely operated even in an environment containing corrosive gas such as chlorine gas, etc., by forming an oxide film on the surface of aluminum metal or aluminum alloy, a hole sealing layer on the oxide film, and an epoxy resin layer on the hole sealing layer. CONSTITUTION:In an anticorrosion material for a turbo molecular pump, an oxide film is formed on the first layer of the surface of aluminum metal or aluminum alloy. A hydrate Al2O3.xH2O is formed as a second layer for hole sealing. Further, when the hydrate is formed, hydroxides Ni(OH)2, Al(OH)3 are simultaneously formed, and epoxy resin is formed as a third layer. A hole sealing is executed by a nickel acetate bath for hole sealing, vacant holes are sealed with the hydrate and hydroxides Ni(OH)2, Al(OH)3 to improve its anticorrosion, and the epoxy resin is formed at the third layer to improve its anticorrosion. |
