| 摘要 |
<p>PURPOSE:To contain and align a pellet of a shape like a bump correctly in a pellet containing recess by providing a micromesh having a plurality of second through holes of smaller diameter than a first through hole and independent shapes from each other in the bottom face side of the pellet containing recess. CONSTITUTION:Since a first through hole 14 is blocked through a micromesh 20 in a body 16 of a pellet 16 if the body 16a of the pellet 16 is opposed to the bottom face 6 side of a pellet containing recess 4 when a jig B for containing and aligning a pellet is vibrated, the pellet is sucked and held, when the first through hole 14 is evacuated in vacuum, in the pellet containing recess 4. If the bump 16b of the pellet 16 is opposed to the bottom face 6 side of the pellet containing recess 4, the second through holes 18,... and the first through hole 14 are not blocked by the bump 16b. Accordingly, the first through hole 14 is not evacuated in vacuum, and the pellet 16 is not attracted to the bottom face 6 of the pellet containing recess 4. The pellet 16 is eventually aligned in a correctly containing state in the containing recess 4.</p> |
