| 摘要 |
PURPOSE:To remove the resists formed and spread to the edges, sides and back of a glass substrate by providing holes for supplying a solvent which removes the resists in the end edge of the substrate and holes for discharging the vapor of the solvent in over nozzles and providing holes for discharging of the solvent in under nozzle. CONSTITUTION:This device has a nozzle 100 consisting of the over nozzle 2 and the under nozzle 3. The over nozzle 2 is provided with plural pieces of the supply holes 4 for discharging the solvent 10 to dissolve the resists 8 in a space 9 and plural pieces of the discharge holes 5 for discharging the vapor 11 of the solvent 10 to the outside of the space 9 in the longitudinal direction thereof. The under nozzle 3 is provided with the plural discharge holes 6 for discharging the waste liquid 12 of the solvent 10 to the outside of the space 9 in the longitudinal direction thereof. The resists 8 spread and formed to the edges, sides and back of the glass substrate 1 are removed in this way. |
