| 摘要 |
PURPOSE:To reduce the generation of arc discharge, and to extract a laser output efficiently while lengthening the lifetime of a laser gas by using metallic plating executed onto the internal surface of a dielectric as a corona electrode. CONSTITUTION:Metallic plating 2 executed onto the internal surface of a corona dielectric 1 surrounding a corona electrode and metallic powder 4 filled into space surrounded by the corona dielectric 1 are employed as the corona electrode. Consequently, the surface of the corona dielectric 1 and the corona electrode are brought into contact uniformly, and contact areas are increased. Capacitance between the corona electrode and a perforated electrode 3 is augmented, energy injected to corona discharge generated between the perforated electrode 3 and the corona dielectric 1 is elevated, and the quantity of ultraviolet rays generated by corona discharge can be increased. Accordingly, arc discharge generated at the time of the discharge of laser excitation is inhibited, thus acquiring a laser output efficiently, then suppressing the deterioration of a laser gas by the generation of arc discharge. |
