| 摘要 |
PURPOSE:To prevent the oxidation of AlN forming a sintered body and to increase the heat conductivity of the sintered body by forming a borosilicate glass film on the surface of the sintered body. CONSTITUTION:AlN is mixed with 1-10wt.% B or B compd. such as BN and 1-10wt.% Si or Si compd. such as SiO2 as sintering aids and this mixture is molded, calcined in an inert atmosphere and sintered at 1,000-1,500 deg.C for 2-5hr in an oxygen-contg. atmosphere. A borosilicate glass film of about 1mum thickness is formed on the surface of the resulting AlN sintered body. |
