| 摘要 |
PURPOSE:To obtain a high density AlN sintered body having superior heat conductivity by mixing AlN powder with specified sintering aids and subjecting this mixture to molding and sintering in a nonoxidizing atmosphere. CONSTITUTION:Ca and Cu oxides as sintering aids are added to AlN powder of <=4.0mum central particle size by 0.01-3wt.% each (expressed in terms of CaO and CuO) basing on the amt. of the AlN in <=1 molar ratio of CuO to CaO and then a nonaq. solvent and a binder such as PVA are added. They are mixed, molded, heated to 1,500-2,000 deg.C at 1-5 deg.C/min heating rate and sintered for 2-20hr to obtain an AlN sintered body having >=3.1g/cm<3> density. |
