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经营范围
发明名称
PLASMA CLEANING
摘要
申请公布号
JPH02156634(A)
申请公布日期
1990.06.15
申请号
JP19880310042
申请日期
1988.12.09
申请人
HITACHI LTD
发明人
WATANABE SEIICHI
分类号
H01L21/302;H01L21/205;H01L21/304;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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