| 摘要 |
PURPOSE:To reduce a consumed flow rate of He remarkably and to obtain a stage with which a mask water can be aligned highly accurately without making a constitution large-sized by a method wherein the He of an atmosphere gas inside a chamber is circulated and used also for static-pressure bearing use. CONSTITUTION:An SR beam generated at a heat-ray meter is passed through a beam line 9, a Be window 10 and a mask 1 of a chamber 11 of He atmosphere and exposes a wafer 2 to be aligned with an x-stage and a y-stage 4, 3 which use He as a static bearing. Then, the He is circulated via a vacuum pump 20, a compressor 21 and the like; it is used as a static bearing fluid; the air is not used as a bearing fluid; a consumed flow rate of the He is reduced remarkably; a constitution is not made large-sized; a friction and the like are made small by using the fluid bearing; it is possible to obtain a wafer stepping stage of a direct-acting guide apparatus with which the wafer can be aligned highly accurately. |
