| 摘要 |
PURPOSE:To eliminate contamination of laser gas even in case of an excimer laser using a corrosive halogen gas and to improve its laser oscillation efficiency and lifetime by sealing a capacitor in a fluorine resin molded form except a leading electrode terminal. CONSTITUTION:Leading electrodes 101, 102 ara attached to both ends of a dielectric 100 through ohmic contact parts 103, 104. A capacitor is covered with fluorine resin 108 except the ends of the electrode 101, 102. |
