| 摘要 |
PURPOSE:To attain an appearance inspection with satisfactory accuracy without changing the resolution of a camera by giving the appearance inspection device composition in which an IC having a gull-wing-type leads is mounted on a mirror, illuminated from an 45 deg. direction, and image-picked up. CONSTITUTION:A light beam 3c emitted from an illuminator 3 is made into a light beam which is reflected on a lead tip surface 1a of an IC 1, reflected on a mirror 2 as an inspection base and returned, and another light beam which is reflected on the mirror 2, reflected on the lead tip surface 1a and returned, and when a camera 4 image picks up these light beams, the camera 4 image picks up the real image of the lead tip surface 1a and the mirror reflected image in the same brightness and sends the converted outputs to a picture processing inspection device 5 as video signals. Thus, in the picture processing inspection device 5, since a result obtained by multiplying the clearance between the lead tip surface 1a and the mirror 2 by sq. rt. 2 is to be measured by measuring and deciding a clearance alpha between the real image of the lead tip surface 1a and the mirror reflected image inspection accuracy can be improved by using the same camera 4 as that in a conventional case. |
