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发明名称
NOVEL DIAZO CPD AS PHOTOSENSITIVE SOLUBILISATION INHIBITOR FOR DEEP-UV RESIST
摘要
申请公布号
AU598039(B2)
申请公布日期
1990.06.14
申请号
AU19870079321
申请日期
1987.10.02
申请人
J.T. BAKER INC
发明人
GEORGE SCHWARTZKOPF
分类号
G03C1/72;C07F7/08;G03F7/016;(IPC1-7):G03F7/08;C07C113/00;C07F7/10;G03F7/26
主分类号
G03C1/72
代理机构
代理人
主权项
地址
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