| 摘要 |
PURPOSE:To efficiently execute the marking work by providing a mirror unit being movable and rotatable against a laser optical axis emitted through a mask, and a first, a second and a third mirrors for allowing an incident optical axis and an emitted optical axis to coincide with each other on said unit. CONSTITUTION:A mirror unit 18 is provided so as to be movable, and also, so as to be rotatable around the laser optical axis A in its moving state against the laser optical axis A emitted through a mask 13 from a laser oscillator 11. In its moving state, a laser light is received at a prescribed incident angle by a first mirror 22. A reflected light by a first mirror 22 is received at a prescribed incident angle by a second mirror 23. Subsequently, by a third mirror 24, laser beams from a first and a second mirrors are allowed to coincide with the laser optical axis A from the laser oscillator 11 and emitted. In such a way, the marking work can be executed efficiently. |
