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发明名称
POROUS BOTTOM-LAYER DIELECTRIC COMPOSITE STRUCTURE
摘要
申请公布号
EP0254238(A3)
申请公布日期
1990.06.13
申请号
EP19870110431
申请日期
1987.07.18
申请人
E.I. DU PONT DE NEMOURS AND COMPANY
发明人
MARTIN, PAUL JAMES;DUEBER, THOMAS EUGENE
分类号
C04B35/00;C04B38/00;C04B41/52;H01B3/08;H01L21/48;H05K1/00;H05K1/03;H05K3/46;(IPC1-7):H01L21/70
主分类号
C04B35/00
代理机构
代理人
主权项
地址
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