Coordinate probe employing a contactless measuring principle of absolute interferometry
摘要
The invention relates to a device for the interferometric determination of the position of a scanning point on a reflecting or diffusely reflecting surface. In combination with coordinate measuring machines, it enables a unique 3-D coordinate measurement in a manner similar to mechanically touching probes, but with the high permissible processing and scanning rates of optical scanning systems. The device is based on multifrequency two-beam interferometry. In this case, use is made of a defined phase angle and/or phase relationship between the interference signals of the various frequencies in order to determine position. The device is applied in dimensional metrology, in particular as a scanning system for coordinate measuring machines.
申请公布号
DE3841742(A1)
申请公布日期
1990.06.13
申请号
DE19883841742
申请日期
1988.12.10
申请人
HUESER-TEUCHERT, DOROTHEE, 3300 BRAUNSCHWEIG, DE;TRAPET, EUGEN, DR.-ING., 3304 BORTFELD, DE
发明人
HUESER-TEUCHERT, DOROTHEE, 3300 BRAUNSCHWEIG, DE;TRAPET, EUGEN, DR.-ING., 3304 BORTFELD, DE